Art
J-GLOBAL ID：200902059220742438   Reference number：89A0241749

Contaminants inspection technology for semiconductor industry.

半導体用異物検査技術
Author (1)：
AKIYAMA NOBUYUKI

About AKIYAMA NOBUYUKI

(日立)

About 日立


Material：
精密工学会誌  (Journal of the Japan Society for Precision Engineering)

About 精密工学会誌


Volume： 55  Issue： 2  Page： 294-298  Publication year： Feb. 1989 
JST Material Number： F0268A  ISSN： 0912-0289  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
semiconductor device

About semiconductor device

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
pollution monitoring

About pollution monitoring


   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=89A0241749&from=J-GLOBAL&jstjournalNo=F0268A") }}
JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
異物検査

About 異物検査


Return to Previous Page

TOP

BOTTOM