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J-GLOBAL ID：200902059569004876   Reference number：91A0317180

Nanometer interferometric displacement measurement system.

ナノメーター測長システム
Author (1)：
ISHIDA AKIRA

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(新技術事業団)

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Material：
光学  (Japanese Journal of Optics)

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Volume： 20  Issue： 3  Page： 158-159  Publication year： Mar. 1991 
JST Material Number： G0125B  ISSN： 0389-6625  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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optical interferometry

About optical interferometry

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of length,area,cross section,volume,angle 
(AD05020O)

About Measuring methods and instruments of length,area,cross section,volume,angle

,  Interferometry and interferometers 
(BD07070G)

About Interferometry and interferometers

Terms in the title (2)：
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ナノメーター

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, 
測長

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