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J-GLOBAL ID:200902060091560148   Reference number:85A0101711

Investigation of hydrocarbon-plasma-generated carbon films by electron-energy-loss spectroscopy.

電子エネルギー損失スペクトルによる炭化水素プラズマ生成炭素薄膜の研究
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Volume: 30  Issue:Page: 4713-4718  Publication year: Oct. 15, 1984 
JST Material Number: D0746A  ISSN: 1098-0121  CODEN: PRBMDO  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Structure of amorphous semiconductors  ,  Electron spectroscopy 
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