Art
J-GLOBAL ID：200902063041378658   Reference number：90A0833992

Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz.

13,56MHzの低圧アルゴンrf放電での異常に低いエネルギーの電子と加熱モード移行
Author (2)：
GODYAK V A

About GODYAK V A

(GTE Lab. Inc., Massachusetts)

About GTE Lab. Inc., Massachusetts

, 
PIEJAK R B

About PIEJAK R B

(GTE Lab. Inc., Massachusetts)

About GTE Lab. Inc., Massachusetts


Material：
Physical Review Letters  (Phys Rev Lett)

About Physical Review Letters


Volume： 65  Issue： 8  Page： 996-999  Publication year： Aug. 20, 1990 
JST Material Number： H0070A  ISSN： 0031-9007  CODEN： PRLTAO  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
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high frequency discharge

About high frequency discharge

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
pressure dependence

About pressure dependence

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Gas discharges 
(BJ03020T)

About Gas discharges

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
低圧

About 低圧

, 
アルゴン

About アルゴン

, 
RF放電

About RF放電

, 
エネルギー

About エネルギー

, 
電子

About 電子

, 
移行

About 移行


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