Art
J-GLOBAL ID：200902063336157750
Reference number：91A0005841
Ta as a barrier for the Cu/PtSi, Cu/Si, and Al/PtSi structures.
Cu/PtSi,Cu/SiおよびAl/PtSi構造の障壁としてのTa
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Author (1)：
Material：
Volume：
8
Issue：
5
Page：
3796-3802
Publication year：
Sep. 1990
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Diffusion in metals
, 半導体-金属接触【’81~’92】
Terms in the title (5)：
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Keywords automatically extracted from the title.
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