Art
J-GLOBAL ID:200902065569591704   Reference number:93A0139629

Spiral Grooved Vacuum Pump Working in the Coarse Vacuum Region. Improvement in Performance by Means of Grooved Sleeves.

低真空領域で作動するねじ溝式真空ポンプ 溝付きスリーブによる性能改善
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Material:
Volume: 58  Issue: 556  Page: 3666-3670  Publication year: Dec. 1992 
JST Material Number: F0036B  ISSN: 0387-5016  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Vacuum pumps 
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