Art
J-GLOBAL ID:200902065902955735   Reference number:90A0638022

Frictional study of IC-processed micromotors.

集積回路製作技術によるマイクロモータの摩擦の考察
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Material:
Volume: 21  Issue: 1/3  Page: 180-183  Publication year: Feb. 1990 
JST Material Number: B0345C  ISSN: 0924-4247  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Motors  ,  Servo mechanisms 
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