Art
J-GLOBAL ID：200902068256982418
Reference number：91A0748377
Thermal Stress Relaxation in Vapor Deposited Thin Films.
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Author (2)：
,
Material：
Volume：
34
Page：
587-600
Publication year：
1991
JST Material Number：
H0119C
Document type：
Article
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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