The effect of O<sub>2</sub> on reactively sputtered zinc oxide.

AITA C R; PURDES A J; LAD R J; FUNKENBUSCH P D

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J-GLOBAL ID：200902069410136432 Reference number：81A0049239

The effect of O₂ on reactively sputtered zinc oxide.

反応性スパッタZnOへのO₂の効果

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Author (4)： , , ,
Material：
Volume： 51 Issue： 10 Page： 5533-5536 Publication year： Oct. 1980
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Sputtering , Oxide thin films

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The effect of O2 on reactively sputtered zinc oxide.

The effect of O₂ on reactively sputtered zinc oxide.