Art
J-GLOBAL ID：200902069997198974   Reference number：85A0367531

Deposition of ultra fine particles using a gas jet.

超微粒子のガスデポジション
Author (1)：
HAYASHI CHIKARA

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(新技術開発事業団)

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Material：
応用物理  (JSAP International)

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Volume： 54  Issue： 7  Page： 687-693  Publication year： Jul. 1985 
JST Material Number： F0252A  ISSN： 0369-8009  CODEN： OYBSA  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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fine particle

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JST classification (1)：
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Techniques and equipment of thin film deposition 
(BK14020I)

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微粒子

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, 
ガスデポジション

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