Art
J-GLOBAL ID:200902070185268390   Reference number:88A0502418

Modern measurement techniques in surface metrology. Part I. Stylus instruments, electron microscopy and non-optical comparators.

表面計測学の新しい計測技術 I 触針法,電子顕微鏡および非光学式コンパレータ
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Material:
Volume: 125  Issue:Page: 271-288  Publication year: Aug. 01, 1988 
JST Material Number: E0377A  ISSN: 0043-1648  Document type: Article
Article type: 解説  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Measuring methods and instruments of length,area,cross section,volume,angle 

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