Art
J-GLOBAL ID：200902074152510190   Reference number：82A0085256

SnO2膜のテーパエッチ

Author (2)：
SASANO AKIRA

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(日立中研)

About 日立中研

, 
NAKANO TOSHIO

About NAKANO TOSHIO

(日立中研)

About 日立中研


Material：
真空  (Journal of the Vacuum Society of Japan)

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Volume： 24  Issue： 12  Page： 653-659  Publication year： Dec. 1981 
JST Material Number： G0194A  ISSN： 0559-8516  CODEN： SHINA  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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tin oxide

About tin oxide

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Techniques for samples 
(BA02070O)

About Techniques for samples

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Reference (9)：
  • 1) 熊田明生 : 固体物理6 (1971) 164
  • 2) 笹野晃他 : テレビジョン29 (1975) 485
  • 3) A. Sasano et al. : IEDM Technical digest (1974) 74
  • 4) 笹野晃他 : 1979年テレビジョン学会全国大会予稿p.83
  • 5) J. C. North et al. : IEEE Trans. on E. D. ED-25 (1978) 809
ｍore...

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