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J-GLOBAL ID:200902074400223276   Reference number:87A0007905

Anisotropy induced signal waveform modulation of DC magnetron sputtered thin film disks.

DCマグネトロンスパッタリングによる薄膜ディスクの異方性に由来する信号波形の変化
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Volume: 22  Issue:Page: 579-581  Publication year: Sep. 1986 
JST Material Number: A0339B  ISSN: 0018-9464  CODEN: IEMGAQ  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Electronic recording,magnetic recording,optical recording 
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