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J-GLOBAL ID：200902077177810856   Reference number：87A0183235

An ultramicro indentation hardness tester and its application to thin films.

超ミクロ押込み硬さ計とその薄膜への応用
Author (2)：
YANAGISAWA M

About YANAGISAWA M

(NEC Corp., Kawasaki, JPN)

About NEC Corp., Kawasaki, JPN

, 
MOTOMURA Y

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(NEC Corp., Kawasaki, JPN)

About NEC Corp., Kawasaki, JPN


Material：
Lubrication Engineering  (Lubr Eng)

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Volume： 43  Issue： 1  Page： 52-56  Publication year： Jan. 1987 
JST Material Number： C0445A  ISSN： 0024-7154  CODEN： LUENA  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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semiconductor thin film

About semiconductor thin film

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measurement,testing and reliability of solid-state devices 
(NC03040G)

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Terms in the title (3)：
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Keywords automatically extracted from the title.
押込み硬さ

About 押込み硬さ

, 
薄膜

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, 
応用

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