Art
J-GLOBAL ID：200902080274967299   Reference number：86A0335485

Basic examination for the formation of TiN film by ion implantation.

イオン注入によるTiN膜生成の基礎検討
Author (4)：
HAGINOYA MITSUO

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(日立日立研)

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, 
ASAHI NAOTATSU

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(日立日立研)

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, 
SATO TADASHI

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(日立日立研)

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, 
OHATA KOKICHI

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(日立日立研)

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Material：
金属表面技術協会講演大会講演要旨集  (金属表面技術協会学術講演大会講演要旨集)

About 金属表面技術協会講演大会講演要旨集


Volume： 73rd  Page： 128-129  Publication year： Mar. 1986 
JST Material Number： Y0050A  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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aluminum base alloy

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,...
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JST classification (1)：
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Ceramic coating to metallic materials 
(YC02050V)

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Terms in the title (3)：
Terms in the title
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イオン注入

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, 
TiN膜

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, 
基礎

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