Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena.

SELWYN G S; HEIDENREICH J E; HALLER K L

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J-GLOBAL ID：200902081689577875 Reference number：92A0050694

Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena.

プラズマ処理中におけるラスタレーザ光散乱研究粒子汚染捕獲現象

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Author (3)： , ,
Material：
Volume： 9 Issue： 5 Page： 2817-2824 Publication year： Sep. 1991
JST Material Number： C0789B ISSN： 0734-2101 CODEN： JVTAD6 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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