Art
J-GLOBAL ID:200902082055708442   Reference number:92A0179504

Textured aluminum-doped zinc oxide thin films from atmospheric pressure chemical-vapor deposition.

大気圧化学蒸着したアルミニウムをドープした酸化亜鉛の集合組織を持つ薄膜
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Material:
Volume: 71  Issue:Page: 880-890  Publication year: Jan. 15, 1992 
JST Material Number: C0266A  ISSN: 0021-8979  CODEN: JAPIAU  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Thesaurus term/Semi thesaurus term
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Category name(code) classified by JST.
Semiconductor thin films 

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