Art
J-GLOBAL ID：200902085733788183   Reference number：88A0121042

A new polymeric multilayers substrate.

新しいポリマ多層基板
Author (3)：
OHDAIRA H

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(Toshiba Corp., Kawasaki, JPN)

About Toshiba Corp., Kawasaki, JPN

, 
SAITO M

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(Toshiba Corp., Kawasaki, JPN)

About Toshiba Corp., Kawasaki, JPN

, 
IIDA A

About IIDA A

(Toshiba Corp., Kawasaki, JPN)

About Toshiba Corp., Kawasaki, JPN


Material：
Proceedings of the International Symposium on Microelectronics  (ISHM)

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Volume： 1987  Page： 515-521  Publication year： 1987 
JST Material Number： A0946B  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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multistory structure

About multistory structure

,...
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JST classification (1)：
JST classification
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Materials of solid-state devices 
(NC03020K)

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Terms in the title (2)：
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ポリマ

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, 
多層基板

About 多層基板


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