Alicyclic Polymer for ArF and KrF Excimer Resist Based on Chemical Amplification.

KAIMOTO Y; NOZAKI K; TAKECHI S; ABE N

Art

J-GLOBAL ID：200902086076313907 Reference number：92A0633958

Alicyclic Polymer for ArF and KrF Excimer Resist Based on Chemical Amplification.

Publisher site Copy service {{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=92A0633958&COPY=1") }}
Access JDreamⅢ for advanced search and analysis. {{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=92A0633958&from=J-GLOBAL&jstjournalNo=D0943A") }}

Author (4)： , , ,
Material：
Volume： 1672 Page： 66-73 Publication year： 1992
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

Return to Previous Page