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J-GLOBAL ID：200902086352611704   Reference number：85A0241221

Stepper FPA-1550.

縮小投影露光装置FPA-1550
Author (2)：
TAKAHASHI KAZUO

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(キャノン光機開セ)

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, 
KOSUGI MASAO

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(キャノン光機開セ)

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Material：
電子材料  (Electronic Parts and Materials)

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Volume： 24  Issue： 3  Page： 33-38  Publication year： Mar. 1985 
JST Material Number： F0040A  ISSN： 0387-0774  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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VLSI

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resolution

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Manufacturing technology of solid-state devices 
(NC03030V)

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縮小投影露光装置

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