About ONISAWA K
About Hitachi Ltd., Ibaraki, JPN
About ABE Y
About Hitachi Ltd., Ibaraki, JPN
About NAKAYAMA T
About Hitachi Ltd., Ibaraki, JPN
About FUYAMA M
About Hitachi Ltd., Ibaraki, JPN
About ONO Y A
About Hitachi Ltd., Ibaraki, JPN
About Thin Solid Films
About thin film growth
About Oxide thin films
About RFスパッタ
About 作製
About Ta2O5
About SiO2
About 薄膜
About 破壊特性