Art
J-GLOBAL ID：200902088805331190   Reference number：86A0552246

Piezoelectricdriven XYθ table.

圧電素子を用いたXYθテーブル
Author (2)：
SUGIWARA KAZUYOSHI

About SUGIWARA KAZUYOSHI

(東芝)

About 東芝

, 
TOJO TOORU

About TOJO TOORU

(東芝)

About 東芝


Material：
精密工学会誌  (Journal of the Japan Society for Precision Engineering)

About 精密工学会誌


Volume： 52  Issue： 8  Page： 1443-1446  Publication year： Aug. 1986 
JST Material Number： F0268A  ISSN： 0912-0289  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
piezoelectric device

About piezoelectric device

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=86A0552246&from=J-GLOBAL&jstjournalNo=F0268A") }}
JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
圧電素子

About 圧電素子


Return to Previous Page

TOP

BOTTOM