Art
J-GLOBAL ID:200902090300309284   Reference number:91A0225736

Abrasive machining of silicon.

シリコンの砥粒加工
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Material:
Volume: 39  Issue:Page: 621-635  Publication year: 1990 
JST Material Number: E0026A  ISSN: 0007-8506  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Materials of solid-state devices  ,  Grinding 
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