Art
J-GLOBAL ID：200902090300309284   Reference number：91A0225736

Abrasive machining of silicon.

シリコンの砥粒加工
Author (5)：
TOENSHOFF H K

About TOENSHOFF H K

, 
SCHMIEDEN W

About SCHMIEDEN W

, 
INASAKI I

About INASAKI I

, 
KOENIG W

About KOENIG W

, 
SPUR G

About SPUR G


Material：
CIRP Annals (International Inst. for Production Engineering Research)  (Manufacturing Technology)

About CIRP Annals (International Inst. for Production Engineering Research)


Volume： 39  Issue： 2  Page： 621-635  Publication year： 1990 
JST Material Number： E0026A  ISSN： 0007-8506  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
dressing (machining)

About dressing (machining)

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
チップ【IC】

About チップ【IC】


   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=91A0225736&from=J-GLOBAL&jstjournalNo=E0026A") }}
JST classification (2)：
JST classification
Category name(code) classified by JST.
Materials of solid-state devices 
(NC03020K)

About Materials of solid-state devices

,  Grinding 
(QC03000R)

About Grinding

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
シリコン

About シリコン

, 
砥粒加工

About 砥粒加工


Return to Previous Page

TOP

BOTTOM