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J-GLOBAL ID:200902090352196470   Reference number:88A0548535

Application of electroless nickel plating in the semiconductor microcircuit industry.

半導体ミクロ配線工業における無電解ニッケルめっきの適用
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Volume: 75  Issue:Page: 70-76  Publication year: Jul. 1988 
JST Material Number: D0341A  ISSN: 0360-3164  Document type: Article
Article type: 解説  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Electroless plating  ,  Manufacturing technology of solid-state devices 
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