Art
J-GLOBAL ID：200902091241205298   Reference number：88A0527606

Detecting dust on semiconductor wafers.

半導体ウエーハの汚れを見る
Author (1)：
KONISHI YOSHIKAZU

About KONISHI YOSHIKAZU

(東京光学機械)

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Material：
Surface Control & 洗浄設計

About Surface Control & 洗浄設計


Issue： 37  Page： 2-9  Publication year： 1988 
JST Material Number： Y0281A  ISSN： 0911-3916  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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wafer

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,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Solic-state devices in general 
(NC03010Z)

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Terms in the title (2)：
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半導体ウエーハ

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, 
汚れ

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