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J-GLOBAL ID:200902091970111988   Reference number:88A0037061

Electronic promotion of silicon nitridation by alkali metals.

アルカリ金属によるシリコンの窒化の電子的促進
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Material:
Volume: 59  Issue: 13  Page: 1488-1491  Publication year: Sep. 28, 1987 
JST Material Number: H0070A  ISSN: 0031-9007  CODEN: PRLTAO  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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金属-絶縁体-半導体構造【’81~’92】  ,  Catalytic reactions(heterogeneous system) 
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