Art
J-GLOBAL ID：200902097635796389   Reference number：90A0718330

Pyrolytic deposition of carbon films containing nitrogen and/or boron.

窒素及び(または)ほう素含有炭素膜の熱分解析出
Author (2)：
MAYA L

About MAYA L

(Oak Ridge National Lab., Tennessee)

About Oak Ridge National Lab., Tennessee

, 
HARRIS L A

About HARRIS L A

(Oak Ridge National Lab., Tennessee)

About Oak Ridge National Lab., Tennessee


Material：
Journal of the American Ceramic Society  (J Am Ceram Soc)

About Journal of the American Ceramic Society


Volume： 73  Issue： 7  Page： 1912-1916  Publication year： Jul. 1990 
JST Material Number： C0253A  ISSN： 0002-7820  CODEN： JACTAW  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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Carbon

About Carbon

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
silica

About silica

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
窒素

About 窒素

, 
ほう素

About ほう素

, 
炭素膜

About 炭素膜

, 
熱分解

About 熱分解

, 
析出

About 析出


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