Art
J-GLOBAL ID：200902099599161978   Reference number：81A0193475

Optical heterodyne profilometry.

光ヘテロダイン表面形状測定
Author (1)：
SOMMARGREN G E

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(Univ. California)

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Material：
Applied Optics  (Lasers, Photonics, and Environmental Optics)

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Volume： 20  Issue： 4  Page： 610-618  Publication year： Feb. 15, 1981 
JST Material Number： B0026B  ISSN： 1559-128X  CODEN： APOPAI  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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surface roughness

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Interferometry and interferometers 
(BD07070G)

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,  Measuring methods and instruments of length,area,cross section,volume,angle 
(AD05020O)

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光ヘテロダイン

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, 
表面形状測定

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