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J-GLOBAL ID:200902100354260251   Reference number:94A0067727

Development of Ultraprecision Grinding Equipment for Ductile Mode Grinding of Brittle Materials.

ぜい性材料の超精密研削技術の研究 超精密研削装置の試作
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Volume: 59  Issue: 12  Page: 1985-1990  Publication year: Dec. 1993 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Grinding  ,  Materials of solid-state devices 
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