Art
J-GLOBAL ID：200902100831229140   Reference number：02A0118583

Microforming.

微小成形
Author (5)：
GEIGER M

About GEIGER M

(Univ. Erlangen-Nuremberg, DEU)

About Univ. Erlangen-Nuremberg, DEU

, 
KLEINER M

About KLEINER M

(Univ. Dortmund, DEU)

About Univ. Dortmund, DEU

, 
ECKSTEIN R

About ECKSTEIN R

(Univ. Erlangen-Nuremberg, DEU)

About Univ. Erlangen-Nuremberg, DEU

, 
TIESLER N

About TIESLER N

(Univ. Erlangen-Nuremberg, DEU)

About Univ. Erlangen-Nuremberg, DEU

, 
ENGEL U

About ENGEL U

(Univ. Erlangen-Nuremberg, DEU)

About Univ. Erlangen-Nuremberg, DEU


Material：
CIRP Annals (International Inst. for Production Engineering Research)  (Manufacturing Technology)

About CIRP Annals (International Inst. for Production Engineering Research)


Volume： 50  Issue： 2  Page： 445-462  Publication year： 2001 
JST Material Number： E0026A  ISSN： 0007-8506  Document type： Article
Article type： 文献レビュー  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
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*micromachining

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,...
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JST classification (1)：
JST classification
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Manufacturing technology of solid-state devices 
(NC03030V)

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微小

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