Art
J-GLOBAL ID:200902101660649614   Reference number:01A0405846

Optical selection, manipulation, trapping, and activation of a microgear structure for applications in micro-optical-electromechanical systems.

マイクロ-オプティカル-エレクトロメカニカル系での応用のためのマイクロギヤ構造の光学的選択,操作,トラッピング,活性化
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Material:
Volume: 40  Issue:Page: 930-937  Publication year: Feb. 20, 2001 
JST Material Number: B0026B  ISSN: 1559-128X  CODEN: APOPAI  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Optics in general  ,  Manufacturing technology of solid-state devices 
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