Electron transport properties and collision cross sections in C<sub>2</sub>F<sub>4</sub>.

YOSHIDA K; GOTO S; TAGASHIRA H; WINSTEAD C; MCKOY B V; MORGAN W L

Art

J-GLOBAL ID：200902101872501560 Reference number：02A0323554

Electron transport properties and collision cross sections in C₂F₄.

C₂F₄における電子輸送特性と衝突断面積

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Author (6)： , , , , ,
Material：
Volume： 91 Issue： 5 Page： 2637-2647 Publication year： Mar. 01, 2002
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Plasma diagnostics , Plasma in general

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Electron transport properties and collision cross sections in C2F4.

Electron transport properties and collision cross sections in C₂F₄.