Art

J-GLOBAL ID：200902102486872534   Reference number：04A0235971

Development of a Unique High Precision Linear motor Integrated Air Slide Table and its Application to Laser Beam Writer

Author (2)： ONDA H (Shizuoka Inst. of Sci. and Technol., Shizuoka, JPN) ,  FUJII S (NTN Corp.)
Material： 1st Korea-Japan Conference on Positioning Technology, 2002  (1st Korea Japan Conf Positioning Technol 2002)
Page： 25-26  Publication year： 2002 
JST Material Number： K20030039  Document type： Proceedings
Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Terms in the title (2)： ITS ,  LASER