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J-GLOBAL ID：200902104295820090   Reference number：98A0119348

Microdynamical systems.

マイクロダイナミカルシステム
Author (1)：
MULLER R S

About MULLER R S

(Univ. California, CA, USA)

About Univ. California, CA, USA


Material：
NATO ASI Series. E. Applied Sciences  (NATO ASI Ser E)

About NATO ASI Series. E. Applied Sciences


Volume： 330  Page： 579-599  Publication year： 1997 
JST Material Number： C0593B  Document type： Proceedings
Article type： 解説  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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functional device

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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

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