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J-GLOBAL ID:200902104324186451   Reference number:97A0852056

Theoretical Demonstration of a Newly Designed Micro-Rotator Driven by Optical Pressure on a Light Incident Surface.

光入射表面上の光圧により駆動された新設計マイクロ回転子の理論的検証
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Volume:Issue:Page: 447-449  Publication year: Jul. 1997 
JST Material Number: L2272A  ISSN: 1340-6000  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Optics in general  ,  Other machine elements 
Reference (8):
  • HIGURASHI, E. Appl. Phys. Lett. 1994, 64, 2209
  • HIGURASHI, E. Proceedings of International Symposium on Microsystems (Sendai, 1995). 1995, 63
  • GAUTHIER, R. C. Appl. Phys. Lett. 1996, 69, 2015
  • YAMAMOTO, A. Jpn. J. Appl. Phys. 1995, 34, 3104
  • FEYNMANN, R. J. Microelectromech. Syst. 1993, 2, 4
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