Art
J-GLOBAL ID：200902105786131225   Reference number：99A0109036

Detection of SF6-decomposition product gases using the electricresistance in Tin evaporated thin films.

錫蒸着膜の電気抵抗によるSF6分解ガスの検出
Author (3)：
KAJITA SHOGO

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(豊田工高専)

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, 
USHIRODA SUMIO

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(豊田工高専)

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, 
SATO MASAAKI

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(豊田工高専)

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Material：
豊田工業高等専門学校研究紀要  (Journal of Toyota National College of Technology)

About 豊田工業高等専門学校研究紀要


Issue： 31  Page： 45-48  Publication year： Dec. 1998 
JST Material Number： F0836A  ISSN： 0286-2603  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*gas sensor

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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sulfar hexafluoride

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Analytical instruments 
(CC02020S)

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,  Insulating materials 
(NA04030W)

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Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
錫

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, 
蒸着膜

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, 
電気抵抗

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, 
SF6

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, 
分解ガス

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