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J-GLOBAL ID:200902106089479384   Reference number:00A0240136

Theoretical Calculation of Photoabsorption of Various Polymers in an Extreme Ultraviolet Region.

極端紫外領域における種々の重合体の光吸収の理論計算
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Volume: 38  Issue: 12B  Page: 7109-7113  Publication year: Dec. 30, 1999 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Techniques for samples  ,  Manufacturing technology of solid-state devices 
Reference (18):
  • 1) T. Watanabe and H. Kinoshita: FED J. 8 (1997) 51.
  • 2) A. M. Hawryluck, N. M. Ceglio and D. A. Markle: Microlithogr. World Summer (1997) 17.
  • 3) A. M. Hawryluck, N. M. Ceglio and D. A. Markle: Solid State Technol. Aug (1997) 75, and 151.
  • 4) W. M. Mansfield, J. E. Bjorkholm, A. A. MacDowell, R. R. Freeman, L. H. Szeto, G. N. Taylor, D. M. Tennant, W. K. Waskiewicz, D. L. Windt, D. L. White, O. R. Wood II, R. M. D'Souza and A. R. Neureuther: OSA Proc. Soft-X-Ray Projection Lithogr. 12 (1991) 129.
  • 5) G. D. Kubiak, E. M. Kneedler, R. Q. Hwang, M. T. Schulberg, K. W. Berger, J. E. Bjorkholm and W. M. Mansfield: J. Vac. Sci. Technol. B 10 (1992) 2593.
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