Art
J-GLOBAL ID：200902106690359205   Reference number：99A0775316

Normal Current Density Effect in RF-Discharge According to Results of Two-Dimensional Numerical Modeling.

二次元数値モデリングの結果によるRF放電における正規電流密度効果
Author (2)：
RAIZER Y P

About RAIZER Y P

(Inst. Problems in Mechanics, Russian Acad. Sci., Moscow, RUS)

About Inst. Problems in Mechanics, Russian Acad. Sci., Moscow, RUS

, 
SHNEIDER M N

About SHNEIDER M N

(Princeton Univ., NJ, USA)

About Princeton Univ., NJ, USA


Material：
IEEE Transactions on Plasma Science  (IEEE Trans Plasma Sci)

About IEEE Transactions on Plasma Science


Volume： 27  Issue： 3  Page： 701-706  Publication year： Jun. 1999 
JST Material Number： D0036B  ISSN： 0093-3813  CODEN： ITPSBD  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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*radiofrequency discharge

About radiofrequency discharge

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Gas discharges 
(BJ03020T)

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Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
数値モデリング

About 数値モデリング

, 
RF放電

About RF放電


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