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J-GLOBAL ID:200902106732298015   Reference number:03A0107116

Conductivity Mapping with Resolution of 140 nm in Diameter by Eddy Current Method Using Small Solenoid Coil.

小さなソレノイドコイルを用いた渦電流法による直径140nmの分解能の導電率のマッピング
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Material:
Volume: 43  Issue: 12  Page: 3217-3221  Publication year: Dec. 20, 2002 
JST Material Number: G0668A  ISSN: 1345-9678  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Electrical properties  ,  Nondestructive testing 
Reference (10):
  • 1) Y. Martin and H. K. Wickramasinghe: Appl. Phys. Lett. 50 (1987) 1455–1457.
  • 2) Y. Martin, D. W. Abraham and H. K. Wickramasinghe: Appl. Phys. Lett. 52 (1988) 1103–1105.
  • 3) T. Yamazaki and M. Aono: Mater. Trans. 42 (2001) 1705–1709.
  • 4) W. Wulfhekel and J. Kirschner: Appl. Phys. Lett. 75 (1999) 1944–1946.
  • 5) H. Shibata: Materia Japan 35 (1996) 348–354 [in Japanese].
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