Art
J-GLOBAL ID:200902106897610374
Reference number:98A0631317
X-ray photoelectron spectroscopy characterization of the oxidation of electroplated and sputter deposited copper surfaces.
電気めっきおよびスパッタ蒸着した銅表面の酸化のX線光電子分光特性評価
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Author (3):
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Material:
Volume:
16
Issue:
3 Pt 1
Page:
1227-1232
Publication year:
May. 1998
JST Material Number:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
Document type:
Article
Article type:
原著論文
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
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JST classification (2):
JST classification
Category name(code) classified by JST.
Surface structure of metals
, Metallic thin films
Terms in the title (6):
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