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J-GLOBAL ID:200902106897610374   Reference number:98A0631317

X-ray photoelectron spectroscopy characterization of the oxidation of electroplated and sputter deposited copper surfaces.

電気めっきおよびスパッタ蒸着した銅表面の酸化のX線光電子分光特性評価
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Volume: 16  Issue: 3 Pt 1  Page: 1227-1232  Publication year: May. 1998 
JST Material Number: C0789B  ISSN: 0734-2101  CODEN: JVTAD6  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Surface structure of metals  ,  Metallic thin films 

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