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J-GLOBAL ID:200902107280832945   Reference number:94A0514986

Advanced LSI Failure Analysis and its Limitation.

LSIの最新故障解析技術とその限界
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Volume: 94  Issue: 52(R94 1-5)  Page: 13-18  Publication year: May. 20, 1994 
JST Material Number: S0532B  ISSN: 0913-5685  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Measurement,testing and reliability of solid-state devices 
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