Preparation and Application of Lead Zirconate Titanate (PZT) Films Deposited by Hybrid Process: Sol-Gel Method and Laser Ablation.

TSAUR J; WANG Z J; ZHANG L; ICHIKI M; WAN J W; MAEDA R

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J-GLOBAL ID：200902107456324666 Reference number：03A0050094

Preparation and Application of Lead Zirconate Titanate (PZT) Films Deposited by Hybrid Process: Sol-Gel Method and Laser Ablation.

混合過程で堆積させたジルコニウム酸チタン酸鉛(PZT)薄膜の調製および応用ゾル-ゲル法およびレーザアブレーション

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Material：
Volume： 41 Issue： 11B Page： 6664-6668 Publication year： Nov. 30, 2002
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Ferroelectrics,antiferroelectrics and ferroelasticity , Oxide thin films , Manufacturing technology of solid-state devices

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5) B. A. Tuttle, R. W. Schwartz, D. H. Doughty and J. A. Voigt: Mater. Res. Soc. Symp. Proc. 200 (1993) 159.

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