Art
J-GLOBAL ID：200902107554727370   Reference number：03A0291495

Large-Volume Plasma Production by 6-Phase Voltage Source

6相交流電源を用いた大面積プラズマの生成
Author (1)：
HASHIMOTO YOSHIYUKI

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(神戸高専)

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Material：
プラズマ応用科学  (Applied Plasma Science)

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Volume： 10  Page： 11-16  Publication year： Dec. 2002 
JST Material Number： L4460A  ISSN： 1340-3214  CODEN： POKAFE  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*plasma production

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,...
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JST classification (1)：
JST classification
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Plasma production and heating 
(BJ02060E)

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Terms in the title (3)：
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交流電源

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, 
大面積

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, 
プラズマ

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