Art
J-GLOBAL ID:200902108543686619   Reference number:97A0840125

Hydrogen free tetrahedral carbon film preparation and tribological characterisation.

水素を含まない正四面体炭素膜作製とトライボロジーキャラクタリゼーション
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Material:
Volume: 13  Issue:Page: 213-217  Publication year: 1997 
JST Material Number: A0614C  ISSN: 0267-0844  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds  ,  Carbon and its compounds 
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