Art
J-GLOBAL ID：200902109566833313   Reference number：96A0069011

The Latest Technique of Ultraprecision Positioning. From Nanometer to Picometer - Improvement of Displacement Sensors.

超精密位置決めのための最新技術 ナノメートルからピコメートルへ 変位センサの高精度・高性能化
Author (1)：
HANE KAZUHIRO

About HANE KAZUHIRO

(東北大 工)

About 東北大 工


Material：
精密工学会誌  (Journal of the Japan Society for Precision Engineering)

About 精密工学会誌


Volume： 61  Issue： 12  Page： 1666-1670  Publication year： Dec. 1995 
JST Material Number： F0268A  ISSN： 0912-0289  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
nanometer process

About nanometer process

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=96A0069011&from=J-GLOBAL&jstjournalNo=F0268A") }}
JST classification (1)：
JST classification
Category name(code) classified by JST.
Measurement,testing and reliability of solid-state devices 
(NC03040G)

About Measurement,testing and reliability of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
精密位置決め

About 精密位置決め

, 
変位センサ

About 変位センサ

, 
高性能化

About 高性能化


Return to Previous Page

TOP

BOTTOM