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J-GLOBAL ID：200902109808170748
Reference number：96A0505027
Integrating SCREAM micromachined devices with integrated circuits.
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Author (2)：
,
Material：
Volume：
9th
Page：
44-48
Publication year：
1996
JST Material Number：
W0377A
ISSN：
1084-6999
Document type：
Proceedings
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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