High-pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10<sup>-9</sup> to 10<sup>-2</sup>Torr.

FERRAN R J; BOUMSELLEK S

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J-GLOBAL ID：200902109824803335 Reference number：96A0682899

High-pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10^-9 to 10^-2Torr.

10^-9~10^-2Torrの残留ガス分析用の四重極分析計の小形アレイにおける高圧効果

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Volume： 14 Issue： 3 Pt 1 Page： 1258-1265 Publication year： May. 1996
JST Material Number： C0789B ISSN： 0734-2101 CODEN： JVTAD6 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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High-pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10-9 to 10-2Torr.

High-pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10^-9 to 10^-2Torr.