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J-GLOBAL ID：200902110069051750   Reference number：96A0759012

Dedicated to our students. How to choose the Si wafer diameter and what are the issues in large diameter Si crystal growth?

学生に贈る シリコンウエハーはどこまで大きくなるのか
Author (1)：
TAKASU SHIN'ICHIRO

About TAKASU SHIN'ICHIRO

(SEMIジャパン)

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Material：
応用物理  (JSAP International)

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Volume： 65  Issue： 8  Page： 832-840  Publication year： Aug. 1996 
JST Material Number： F0252A  ISSN： 0369-8009  CODEN： OYBSA  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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silicon

About silicon

,...
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JST classification (2)：
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Materials of solid-state devices 
(NC03020K)

About Materials of solid-state devices

,  Crystal growth of semiconductors 
(BK13040X)

About Crystal growth of semiconductors

Reference (35)：
  • SIA. Semiconductor Technology, Workshop Working Group Reports. 1992
  • SIA. The National Technology Roadmap for Semiconductor. 1994
  • NOYCE, R. Scientific American. 1976, 237, 3, 62
  • 菊池正典. 日本学術振興会第145委員会第68回研究会,東京. 1994, 11
  • TARUI, Y. IEEE Circuits and Devices. 1991, 7-2, 44
ｍore...
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学生

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, 
シリコンウエハー

About シリコンウエハー


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