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J-GLOBAL ID：200902110403157670 Reference number：99A1043507
In Search of Low-k Dielectrics.
低k誘電体の探索
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Author (1)：
MILLER R D
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(
IBM Res. Div., CA, USA
)
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Material：
Science
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Detailed information
Volume：
286
Issue：
5439
Page：
421,423
Publication year：
Oct. 15, 1999
JST Material Number：
E0078A
ISSN：
0036-8075
CODEN：
SCIEA
Document type：
Article
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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低k誘電体
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,
探索
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