Art

J-GLOBAL ID：200902111453344256   Reference number：00A0758878

Organic Molecular Electronics for the 21st Century. Deposition of Polymeric Thin Films by Ionization-Assisted Method.

イオン化支援法によるポリマー薄膜の蒸着

Author (1)： USUI H (Tokyo Univ. Agriaulture and Technol., Koganei-shi, JPN)
Material： IEICE Transactions on Electronics (Institute of Electronics, Information and Communication Engineers)  (IEICE Trans Electron (Inst Electron Inf Commun Eng))
Volume： E83-C  Issue： 7  Page： 1128-1133  Publication year： Jul. 25, 2000 
JST Material Number： L1370A  ISSN： 0916-8524  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *polymer thin film ,...

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JST classification (2)： Thin films of organic compounds  (BK14070L) ,  Manufacturing technology of solid-state devices  (NC03030V)

Reference (12)：

• TAKAGI, T. Physics of thin films. 1987, 13
• TAKAGI, T. Role of ions in ion-based film formation. Thin Solid Films. 1982, 92, 1-17
• USUI, H. Anthracene and polyethylene thin films deposited by ionized cluster beam. J. Vac. Sci. Technol. A. 1986, 4, 1, 52-59
• USUI, H. Effect of substrate temperature on the deposition of polytetrafluoroethylene by an ionization-assisted evaporation method. J. Vac. Sci. Technol. A. 1995, 13, 5, 2318-2324
• TAKAHASHI, Y. Synthesis of aromatic polyimide film by vacuum deposition polymerization. J. Vac. Sci. Technol. A. 1987, 5, 4, 2253-2256

Terms in the title (4)： イオン化 ,  支援 ,  ポリマー薄膜 ,  蒸着